High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J
	Huang, QZ; Yu, JZ; Chen, SW; Xu, XJ; Han, WH; Fan, ZC; Huang, QZ, Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
	2008
会议名称	2nd Conference on Optoelectronic Devices and Integration
会议录名称	OPTOELECTRONIC DEVICES AND INTEGRATION II
页码	6838: J8380-J8380
会议日期	NOV 12-15, 2007
会议地点	Beijing, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	978-0-8194-7013-3
部门归属	[huang, qingzhong; yu, jinzhong; chen, shaowu; xu, xuejun; han, weihua; fan, zhongchao] chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china
摘要	A high quality (Q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. The waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. Experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5dB at telecommunication wavelength near 1550nm. From the measured results, propagation loss in the rib waveguide is determined as low as 6.900/cm. This high Q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices.
关键词	Resonator Silicon-on-insulator Quality Factor Propagation Loss
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/7796
专题	中国科学院半导体研究所（2009年前）
通讯作者	Huang, QZ, Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Huang, QZ,Yu, JZ,Chen, SW,et al. High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2008:6838: J8380-J8380.

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