Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating
	Tu XG; Chen SW; Yu JZ; Wang QM; Chin MK; Tu, XG, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
	2008
会议名称	IEEE PhotonicsGlobal at Singapore
会议录名称	2008 IEEE PHOTONICSGLOBAL@SINGAPORE (IPGC)
页码	VOLS 1 AND 2: 31-34
会议日期	DEC 08-11, 2008
会议地点	Singapore, SINGAPORE
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
出版者	IEEE
ISBN	978-1-4244-3901-0
部门归属	[tu, xiaoguang; chen, shaowu; yu, jinzhong; wang, qiming] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	Micro-cavity structure composed of silicon wire with 240nm square cross section and two symmetrical sidewall waveguide Bragg gratings is fabricated and studied for the operation under telecommunication wavelengths. Optical filter of quasi-TE mode was realized based on this cavity. In such micro-cavity, optical quality factor (Q) was measured up to 380 with a 4.8nm free spectral range (FSR) and 12dB fringe contrast (FC). The measured group index of silicon waveguide with only 240nm square cross section was between 3.80 and 5.43. It is the first time group delay of silicon wire waveguide with such small core dimension is studied. Larger group delay can be expected after optimizing the design parameters and the fabrication process.
关键词	Wave-guides
学科领域	光电子学
主办者	IEEE.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/8256
专题	中国科学院半导体研究所（2009年前）
通讯作者	Tu, XG, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Tu XG,Chen SW,Yu JZ,et al. Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2008:VOLS 1 AND 2: 31-34.

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