Compact polarization-insensitive arrayed waveguide grating based on SOI material

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Compact polarization-insensitive arrayed waveguide grating based on SOI material
	Fang, Q; Li, F; Liu, YL; Fang, Q, Chinese Acad Sci, Inst Semicond, Opt Elect Res & Dev Ctr, Beijing 100083, Peoples R China.
	2005
会议名称	Conference on Optoelectronic Devices and Integration
会议录名称	OPTOELECTRONIC DEVICES AND INTEGRATION丛书标题: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
页码	PTS 1 AND 2 5644: 769-776 Part 1-2
会议日期	NOV 08-11, 2004
会议地点	Beijing, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-5599-7
部门归属	chinese acad sci, inst semicond, opt elect res & dev ctr, beijing 100083, peoples r china
摘要	A compact polarization-insensitive 8x8 arrayed waveguide grating with 100GHz channel spacing at 1.55 mu m is presented on the material of silicon on insulator (SOI). Increasing the epitaxial layer thickness can reduce the birefringence of the waveguide, but the wvaeguide's bend radius also increases at the same time. We choose the SOI wafer with 3.0 mu m epitaxial layer to reduce the device's size and designed the appropriate structure of rib wave-guides to eliminate the polarization dependant wavelength shift. Compared to the other methods of eliminating the polarization dependant wavelength shift, the method is convenient and easy to control the polarization without additional etching process. The index differences between TE0 and TM0 of straight and bend waveguides are 1.4x10(-5) and 3.9x10(-5), respectively. The results showed that the polarization dependant wavelength shift is 0.1nm, and the device size is 1.5x1.0 cm(2).
关键词	Arrayed Waveguide Grating Compact Polarization-insensitive SilicOn On Insulator Silicon-on-insulator Wavelength Demultiplexer Multiplexer Inp Si
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/10078
专题	中国科学院半导体研究所（2009年前）
通讯作者	Fang, Q, Chinese Acad Sci, Inst Semicond, Opt Elect Res & Dev Ctr, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Fang, Q,Li, F,Liu, YL,et al. Compact polarization-insensitive arrayed waveguide grating based on SOI material[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2005:PTS 1 AND 2 5644: 769-776 Part 1-2.

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